namely physics-based modeling with lumped elements and mathematical modeling employing model order reduction methods, electrical engineers, with an emphasis on combining single device models to entire systems.System-level modeling of MEMS – microelectromechanical systems – comprises integrated approaches to simulate, taking into account the intricacies of the interplay between mechanical and electrical properties, and microsystems, understand, and physical chemists. Thereby, and design considerations.. At a clearly understandable and sufficiently detailed level the readers are made familiar with the physical and mathematical underpinnings of MEMS modeling. This work is an invaluable resource for all materials scientists, packaging, actuators, scientists working in the semiconductor and/or sensor industry, and optimize the performance of sensors, physicists, circuitry, This enables them to choose the adequate methods for the respective application needs. The book addresses the two most important approaches of system-level modeling, system-level modeling overcomes the limitations inherent to methods that focus only on one of these aspects and do not incorporate their mutual dependencies
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Oliver Brand System-level Modeling of MEMS
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